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Surface modifications of metals induced by soft X-ray laser pulse irradiations

軟X線レーザーパルスを照射した金属の表面改質

石野 雅彦; Faenov, A. Y.*; 田中 桃子; 長谷川 登; 錦野 将元; 保 智己*; Pikuz, T.; 大場 俊幸*; 海堀 岳史; 河内 哲哉

Ishino, Masahiko; Faenov, A. Y.*; Tanaka, Momoko; Hasegawa, Noboru; Nishikino, Masaharu; Tamotsu, Satoshi*; Pikuz, T.; Oba, Toshiyuki*; Kaihori, Takeshi; Kawachi, Tetsuya

軟X線レーザーによる金属表面加工への応用展開の可能性を探るために、波長13.9nm,パルス幅7psの軟X線レーザーパルスをアルミニウム,銅,金の各表面に集光照射した。照射後の試料表面を走査型電子顕微鏡で観察したところ、アルミニウム表面に銅や金の表面には見られない特異的な円錐状ナノ構造を持つ改質領域が形成されていることを見いだした。アルミニウム表面に形成される改質領域は、軟X線レーザーによる新規なナノ構造の創成として興味深い。このアルミニウム表面に形成される円錐状ナノ構造を利用することによって、立体構造の形成も可能になると考えられる。応用例としては、例えば触媒表面やX線回折素子等が考えられる。

We irradiated the soft X-ray laser (SXRL) pulses having a wavelength of 13.9 nm, the duration time of 7 ps to aluminum (Al), copper (Cu) and gold (Au) surfaces. After the irradiation processes of SXRL beam with laser flux of $$sim$$14 mJ/cm$$^{2}$$ for Al case and of $$sim$$21 mJ/cm$$^{2}$$ for Cu and Au cases, the modified surfaces were observed with the visible microscope, the scanning electron microscope, and the atomic force microscope. The surface modifications caused by the SXRL irradiations were clearly seen on the surfaces, and it was found that the conical structures having around 100 nm in diameters were formed on the Al surface under a single pulse shot. The conical structures were formed in the features with the average depth of about 40 nm, and this value was in accordance with the attenuation length of the SXRL beam for Al. The modified structure on Al surface induced by SXRL pulse irradiations is different from those of Cu and Au surfaces. The modified structure formed on Al surface induced by the SXRL pulse exposure is interesting as the newly structure. Hence, the SXRL beam would be a candidate for a tool of micromachining, which enable to fabricate of three dimensional structures with nano-meter size on Al surface.

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パーセンタイル:63.24

分野:Nanoscience & Nanotechnology

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