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Report No.

Micromachining of commodity plastics by proton beam writing and fabrication of spatial resolution test-chart for neutron radiography

Sakai, Takuro; Yasuda, Ryo; Iikura, Hiroshi  ; Nojima, Takehiro; Matsubayashi, Masahito  ; Kada, Wataru; Koka, Masashi; Sato, Takahiro; Okubo, Takeru; Ishii, Yasuyuki; Takano, Katsuyoshi*

Proton Beam Writing (PBW) is a direct-write technique for producing high-aspect-ratio micro- and nano-structures in resist material. This technique is a promising method for micromachining of commodity plastics such as acrylic resin. In this paper, we introduce fabrication of microscopic devices made of a relatively thick ($$sim$$75 $$mu$$m) acrylic sheet. An optimization of the fluence of 3 MeV proton beam to induce the chain scission in the sheet was performed at Takasaki Advanced Radiation Research Institute, JAEA. A software program that converts image pixels into coordinates data has been developed, and a fine jigsaw puzzle was fabricated on the sheet. The piece size of jigsaw puzzle is 50 $$times$$ 50 $$mu$$m. For practical use, A line and space test-chart for spatial resolution measurement on neutron radiography was also successfully created.



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Category:Instruments & Instrumentation



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