Micromachining of commodity plastics by proton beam writing and fabrication of spatial resolution test-chart for neutron radiography

陽子ビーム描画によるプラスチック材料への微細加工と中性子ラジオグラフィ用空間分解能テストチャートの作成

酒井 卓郎; 安田 良; 飯倉 寛  ; 野島 健大; 松林 政仁  ; 加田 渉; 江夏 昌志; 佐藤 隆博; 大久保 猛; 石井 保行; 高野 勝昌*

Sakai, Takuro; Yasuda, Ryo; Iikura, Hiroshi; Nojima, Takehiro; Matsubayashi, Masahito; Kada, Wataru; Koka, Masashi; Sato, Takahiro; Okubo, Takeru; Ishii, Yasuyuki; Takano, Katsuyoshi*

Proton Beam Writing (PBW) is a direct-write technique for producing high-aspect-ratio micro- and nano-structures in resist material. This technique is a promising method for micromachining of commodity plastics such as acrylic resin. In this paper, we introduce fabrication of microscopic devices made of a relatively thick (75 m) acrylic sheet. An optimization of the fluence of 3 MeV proton beam to induce the chain scission in the sheet was performed at Takasaki Advanced Radiation Research Institute, JAEA. A software program that converts image pixels into coordinates data has been developed, and a fine jigsaw puzzle was fabricated on the sheet. The piece size of jigsaw puzzle is 50 50 m. For practical use, A line and space test-chart for spatial resolution measurement on neutron radiography was also successfully created.