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Fabrication of enzyme-degradable and size-controlled protein nanowires using single particle nano-fabrication technique

大道 正明*; 麻野 敦資*; 佃 諭志*; 高野 勝昌*; 杉本 雅樹; 佐伯 昭紀*; 酒巻 大輔*; 小野田 晃*; 林 高史*; 関 修平*

Nature Communications (Internet), 5, p.3718_1 - 3718_8, 2014/04

 被引用回数:35 パーセンタイル:77.73(Multidisciplinary Sciences)



Micromachining of commodity plastics by proton beam writing and fabrication of spatial resolution test-chart for neutron radiography

酒井 卓郎; 安田 良; 飯倉 寛; 野島 健大; 松林 政仁; 加田 渉; 江夏 昌志; 佐藤 隆博; 大久保 猛; 石井 保行; et al.

Nuclear Instruments and Methods in Physics Research B, 306, p.299 - 301, 2013/07

 被引用回数:7 パーセンタイル:48.84(Instruments & Instrumentation)

Proton Beam Writing (PBW) is a direct-write technique for producing high-aspect-ratio micro- and nano-structures in resist material. This technique is a promising method for micromachining of commodity plastics such as acrylic resin. In this paper, we introduce fabrication of microscopic devices made of a relatively thick ($$sim$$75 $$mu$$m) acrylic sheet. An optimization of the fluence of 3 MeV proton beam to induce the chain scission in the sheet was performed at Takasaki Advanced Radiation Research Institute, JAEA. A software program that converts image pixels into coordinates data has been developed, and a fine jigsaw puzzle was fabricated on the sheet. The piece size of jigsaw puzzle is 50 $$times$$ 50 $$mu$$m. For practical use, A line and space test-chart for spatial resolution measurement on neutron radiography was also successfully created.


Mach-Zehnder polymer waveguides fabricated using proton beam writing

三浦 健太*; 佐藤 隆博; 石井 保行; 江夏 昌志; 桐生 弘武*; 小澤 優介*; 高野 勝昌*; 大久保 猛; 山崎 明義; 加田 渉; et al.

JAEA-Review 2012-046, JAEA Takasaki Annual Report 2011, P. 126, 2013/01

In this study, a PMMA-based MZ waveguide was fabricated utilizing PBW to develop a thermo-optic switch. A 10-$$mu$$m-thick PMMA film was firstly spin-coated onto the 15 $$mu$$m SiO$$_2$$ film as the under cladding. Cores of a MZ waveguide with 8 $$mu$$m width were secondary drawn at the dose of 100 nC/mm$$^2$$ in the PMMA film using PBW with H$$^+$$ beam of the size of $$sim$$1.1 $$mu$$m and beam current of $$sim$$50 pA at 1.7 MeV. The MZ waveguide was drawn by symmetrically coupling two Y junctions and its branching angle was set to 2$$^circ$$ to reduce optical branching loss. Finally a 10-$$mu$$m-thick PMMA film was deposited again on the sample as an upper cladding by spin-coating. The mode-field diameter of near field patterns with about 10 $$mu$$m width was observed at $$lambda$$= 1.55 $$mu$$m on the basis of a fundamental mode without no higher-order modes which required to develop our objective MZ type thermo-optic switch for optical-fiber telecommunication. The result of the observation showed that the PMMA-based single-mode MZ waveguide for $$lambda$$= 1.55 $$mu$$m was successfully fabricated using PBW. As the next step to develop the optical switch, we will form a Ti thin-film heater and A$$ell$$ electrodes on the MZ waveguide using photolithography and wet-etching processes.


MFM observation of micrometer-sized magnetic patterns produced by heavy ion microbeam irradiation in FeRh films

愛甲 一馬*; 唐木 淳志*; 松井 利之*; 岩瀬 彰宏*; 佐藤 隆博; 高野 勝昌*; 江夏 昌志; 齋藤 勇一; 神谷 富裕

JAEA-Review 2012-046, JAEA Takasaki Annual Report 2011, P. 133, 2013/01

As the irradiation effect appears only within irradiated regions, we have used ion micro-beam irradiation to produce micrometer-sized and two-dimensional magnetic patterns on the surface of FeRh thin films. The thin films nearly show the anti-ferromagnetic state at room temperature. To realize the lateral magnetic modification on the sample surface, the micro-beam irradiation was performed by using 3-MeV tandem accelerator at the TIARA. The focused 10 MeV iodine ion micro-beam, which had a rectangular shape of 2$$mu$$m $$times$$ 4$$mu$$m, was scanned on the FeRh thin film surface. After irradiation, the surface roughness and the magnetic state were observed by means of atomic force microscopy (AFM) and magnetic force microscopy (MFM), respectively. The AFM images show that the ion micro-beam does not create any topographic modification at the FeRh surface, while an array with 2$$mu$$m $$times$$ 4$$mu$$m bright rectangles at designated regular intervals is seen in the MFM image. The ion micro-beam is a useful tool for the fabrication of two-dimensional and micrometer-sized magnetic patterns on FeRh samples.


Visualization of a single cluster particle track in polystyrene films

麻野 敦資*; 高野 勝昌*; 千葉 敦也; 齋藤 勇一; 丸井 裕美*; 大道 正明*; 前吉 雄太*; 本庄 義人*; 佐伯 昭紀*; 山田 圭介; et al.

JAEA-Review 2012-046, JAEA Takasaki Annual Report 2011, P. 163, 2013/01

In this study, a visualization of the tracks of fragments from a dissociated cluster ion in a target was tried using polystyrene derivatives with higher sensitivity for the ion beam irradiation. The results were compared with the case of ion beam consisting of single ion, considering the feature of cluster beam irradiation. The ion species were selected to be $$^{12}$$C$$_{4}$$$$^{+}$$ and $$^{48}$$Ti$$^{+}$$. As a result, the density of the structures at the $$^{48}$$Ti$$^{+}$$ beam irradiation was almost the same to the ion fluence. However, the density at the $$^{12}$$C$$_{4}$$$$^{+}$$ irradiation was much less than the ion fluence. It is supposed that many cluster particles are fragmentized during penetration in the polymer film. The radial dose distribution inside a particle tracks is decreased, and then the cross-linking reaction is induced insufficiently. In order to visualize the tracks of the fragmentation, optimization of the development or selection of materials with higher sensitivity should be needed.


Fabrication of Mach-Zehnder polimer waveguides by a direct-drawing technique using a focused proton beam

三浦 健太*; 佐藤 隆博; 石井 保行; 桐生 弘武*; 小澤 優介*; 江夏 昌志; 高野 勝昌*; 大久保 猛; 山崎 明義; 加田 渉; et al.

Key Engineering Materials, 534, p.158 - 161, 2013/00

 被引用回数:5 パーセンタイル:89.67(Nanoscience & Nanotechnology)

We develop a thermo-optic switch of the Mach-Zehnder type polymer waveguide using proton beam writing (PBW). In this study, we succeeded in near field pattern Mach-Zehnder type single mode polymer waveguides at a wavelength of 1550 nm. The samples for the waveguides were composed with a 15-$$mu$$-thick under-cladding layer of SiO$$_2$$ deposited on a Si substrate using radio-frequency sputtering and a 10-$$mu$$m-thick PMMA film spin-coated onto the SiO$$_2$$ layer as a core layer. We wrote Mach-Zehnder type waveguides having a width of 8 $$mu$$m on the PMMA layer by PBW with a beam size of $$sim$$1 $$mu$$m and a beam current of 50 pA. After this writing, the 10-$$mu$$m-thick-PMMA layer was deposited again as an upper-cladding layer by spin-coating. In the observation of these waveguides, the light of laser of 1550-nm wavelength was injected into one side of the waveguide through a single-mode fiber. From the observation of the light emitted from the opposite side of the waveguides, near field patterns was observed using a vidicon camera with an optical microscope. The observation result demonstrated that the light traveled by single mode in the Mach-Zehnder type polymer waveguide. In the conference, we will report the development of the Mach-Zehnder type polymer waveguide in detail. In addition, the thermo-optic switch at the wavelength of 1550 nm by the Mach-Zehnder type polymer waveguide will also be briefly reported.


A Line pair indicator made of Gd film for evaluating spatial resolution

安田 良; 松林 政仁; 酒井 卓郎; 野島 健大; 飯倉 寛; 片桐 政樹*; 高野 勝昌*; Pikuz, T.; Faenov, A.*

Physics Procedia, 43, p.196 - 204, 2013/00

 被引用回数:1 パーセンタイル:53.08(Physics, Applied)

A device for evaluating spatial resolution of a neutron imaging system was developed. By laser processes the line-pair patterns were fabricated on the 5 micrometer thick Gd film evaporated on a glass plate. Large line-pairs ranging from 0.2 to 2 mm wide were machined by Nd:YVO$$_{4}$$ laser with 30 micometer in spot size and displayed on a brightness field. Small line-pairs ranging from 0.01 to 0.1 mm wide were done by eximer laser as a dark field. In the results of SEM observation, although the large line-pairs machined by Nd:YVO$$_{4}$$ laser chipped on the corner of the Gd bars, difference between the measured and designed line-pair eidthe controled within 20 micormeter absolutely. In small line-pairs below 0.1 mm processed by the eximer laser, sharper edge could be formed than that in the large line-pairs. In neutron imaging tests using a LiF/ZnS(Ag) scintillator and a CCD camera system, good contrast images were obtained at brightness field even in 5 micrometer thick. Small line-pairs on the dark field were observed at a LiF single crystal detector, which has ultra-high spatial resolution around 5 micrometer. Split of the small line-pairs even in 0.01 mm wide were shown with good contrast on the image.


Visualization of focused proton beam dose distribution by atomic force microscopy using blended polymer films based on polyacrylic acid

大道 正明*; 高野 勝昌*; 佐藤 隆博; 神谷 富裕; 石井 保行; 大久保 猛; 江夏 昌志; 加田 渉; 杉本 雅樹; 西川 宏之*; et al.

Journal of Nanoscience and Nanotechnology, 12, p.7401 - 7404, 2012/09

 被引用回数:2 パーセンタイル:11.51(Chemistry, Multidisciplinary)

A new visualization method for dose distribution of a focused proton beam in sub-micrometer scale was developed using a formation of a bulky cross-linked structure of polyacrylic acid -$$N$$, $$N$$'-methylence bisacrylamide, blend film. The areas irradiated by the focused proton beam were swelled on the film. The height of the swelling was significantly increased according to the beam fluence and the increase of containing ratio of the methylence bisacrylamide. The height was saturated at the fluence of 5$$times$$10$$^5$$ ions/$$mu$$m$$^{2}$$. The proton beam-sensitive polymer film was used for the analysis of dose distribution on its surface. The irradiated surface was observed by employing an atomic force microscope. This observation result showed that the method could be used to confirm the writing patterns and the beam-spot shape. Nanostructures with a crescent shape are visualized clearly at a misaligned beam-spot shape in the set up of the beam-optics.


Microprocessing of arched bridge structures with epoxy resin by proton beam writing

高野 勝昌*; 麻野 敦資*; 前吉 雄太*; 丸井 裕美*; 大道 正明*; 佐伯 昭紀*; 関 修平*; 佐藤 隆博; 石井 保行; 神谷 富裕; et al.

Journal of Photopolymer Science and Technology, 25(1), p.43 - 46, 2012/07

 被引用回数:2 パーセンタイル:6.50(Polymer Science)

The proton beam writing (PBW) with energy of several MeV ranges is a unique tool of three-dimensional microprocessing for a polymer material. Three-dimensional structures like a bridge structure can be fabricated by the double exposures of PBW with two deferent energies followed by the one-time development using etching solution. In this study, the fabrication of an arched bridge was attempted by means of the supercritical drying with liquid carbon dioxide to a SU-8 photoresist film, as the polymer material, coated on a substrate of epoxy sheet, after the PBW process. In the exposures, two patterns of bridge girders and piers were written with 0.5 and 3 MeV proton beams to the SU-8 photoresist films, respectively. After these writings, the photoresist films were developed with the solution of diacetone alcohol and rinsed with the solution of isopropyl alcohol. Then the supercritical drying with liquid carbon dioxide was used at 12 MPa, 40$$^{circ}$$C. As the results, the bridge structures with curved girders to the vertical direction were formed due to the swelling effect of the photoresist film on the drying. In the conference, the microprocessing method of the bridge structure and the swelling effect of the photoresist film will be represented in detail.


Ion-beam-induced luminescence analysis as diagnostic tool for microstructure patterning on diamond by proton beam writing

加田 渉; 横山 彰人; 江夏 昌志; 高野 勝昌*; 佐藤 隆博; 神谷 富裕

Japanese Journal of Applied Physics, 51(6), p.06FB07_1 - 06FB07_5, 2012/06

 被引用回数:8 パーセンタイル:33.92(Physics, Applied)

ダイヤモンド表面へのイオンビーム微細加工(PBW)プロセスの評価のために、イオンビーム誘起発光分析(micro-IBIL)システムを新たに開発した。3MeVビームで試料表面に描画することで、ダイヤモンド基板(3.0mm$$times$$3.0mm$$times$$0.5mm IIa単結晶ダイヤモンド)中に埋め込まれた微細構造を作製した。PBW描画中にIBIL計測を行うことで、イオンビーム照射に伴う発光の変化を計測できた。照射したダイヤモンドの結晶状態を同じビームラインに設置した単波長型のイオンビーム誘起発光システムによって分析した結果、描画した領域がダイヤモンドのAバンド発光に起因する発光領域と対応していることが確かめられた。


Fabrication of concave and convex structure array consisted of epoxy long-nanowires by light and heavy ion beams lithography

高野 勝昌*; 杉本 雅樹; 麻野 敦資*; 前吉 雄太*; 丸井 裕美*; 大道 正明*; 佐伯 昭紀*; 関 修平*; 佐藤 隆博; 石井 保行; et al.

Transactions of the Materials Research Society of Japan, 37(2), p.237 - 240, 2012/06

A three dimensional microfabrication technique for polymer films has been investigated on the basis of fabricating micrometer structures composed of the fine wire structures which were fabricated by the chemical reaction induced along ion tracks of heavy ions with the energy of hundred MeV. In this study, we propose a new hemispherical microfabrication technique of epoxy resin for the fabrication of optical lenses using two times irradiation technique combining proton beam writing and low fluence irradiation of heavy ion beam. At first, an epoxy resin films composed of an etching and a non-etching layers of epoxy resin were irradiated at a frame pattern using a 3 MeV focused proton beam. At second, the low fluence irradiation of 450 MeV $$^{129}$$Xe$$^{23+}$$ was performed by a raster line scanning with oblique angle of 45 degree. Finally, the non-irradiated area of the etching layer of the films were etched by the developer. The observation of the etched films showed that the dome-like structures arrayed with a grid were formed on the non-etching layer of the epoxy resin films. The more detailed observation showed that each dome was composed of the fine wire structures formed by cross-linking reactions induced along the $$^{129}$$Xe$$^{23+}$$ tracks. The domes are expected to function as optical condenser-lenses.


Fabrication of poly(9,9'-dioctylfluorene)-based nano- and microstructures by proton beam writing

前吉 雄太*; 高野 勝昌*; 麻野 敦資*; 丸井 裕美*; 大道 正明*; 佐藤 隆博; 神谷 富裕; 石井 保行; 大久保 猛; 江夏 昌志; et al.

Japanese Journal of Applied Physics, 51(4R), p.045201_1 - 045201_4, 2012/04

 被引用回数:1 パーセンタイル:4.39(Physics, Applied)

A relation between the fluence and the beam-induced chemical reaction in poly(9,9'-dioctylfluorene), PFO, films has been investigated to fabricate PFO-based nano-micro structures using Proton Beam Writing, PBW. In this investigation, we observed that the cross-linking reaction in PFO occurred without a cross-linking agent using PBW. Furthermore, not only the surface morphology but also structure and shape on PFO films were changed from nano-meter to micro-meter size by controlling the fluence of proton beam irradiation on the basis of the investigation. Consequently, the structure of the arabic numbers was successful fabricated as three-dimensional PFO structures with the aspect ratio of 12 at the fluence of 3.5 $$times$$ 10$$^6$$ ions/$$mu$$m$$^2$$ by PBW.


MFM and PEEM observation of micrometre-sized magnetic dot arrays fabricated by ion-microbeam irradiation in FeRh thin films

愛甲 一馬*; 唐木 淳志*; 松井 利之*; 岩瀬 彰宏*; 佐藤 隆博; 高野 勝昌*; 江夏 昌志; 齋藤 勇一; 神谷 富裕; 大河内 拓雄*; et al.

Journal of Synchrotron Radiation, 19(2), p.223 - 226, 2012/03

 被引用回数:7 パーセンタイル:36.52(Instruments & Instrumentation)

FeRh thin films were irradiated with 10 MeV iodine ion microbeam to produce the lateral magnetic modification in micron-meter scale. Two-dimensional magnetic dot arrays with the dimension of approximately 2$$times$$4 $$mu$$m$$^2$$ as well as 10$$times$$10 $$mu$$m$$^2$$ were successfully produced on the FeRh surface, which was observed by magnetic force microscopy. The results of the photoelectron emission microscopy combined with X-ray magnetic circular dichroism reveal that the easy axis of the magnetization of the ion beam irradiated ferromagnetism in the FeRh thin films lies in the film planes along the $$<$$001$$>$$ direction of the MgO substrates.


Fast single-ion hit system for heavy-ion microbeam at TIARA cyclotron, 4

横田 渉; 佐藤 隆博; 奥村 進; 倉島 俊; 宮脇 信正; 柏木 啓次; 吉田 健一; 江夏 昌志; 高野 勝昌*; 横山 彰人; et al.

JAEA-Review 2011-043, JAEA Takasaki Annual Report 2010, P. 159, 2012/01



3D micro-fabrication utilized superimposing technique with focused MeV ion beams

高野 勝昌*; 佐藤 隆博; 神谷 富裕; 石井 保行; 大久保 猛; 江夏 昌志; 加田 渉; 杉本 雅樹; 関 修平*; 西川 宏之*

JAEA-Review 2011-043, JAEA Takasaki Annual Report 2010, P. 162, 2012/01

A unique micro-processing technique for epoxy resin films has been developed at the TIARA, utilizing the ion beam writing with multiple energies of light and heavy ion beams. In this study, nano-wire structure fabrication was tried by a superimposing with the proton beams and 520 MeV $$^{40}$$Ar$$^{14+}$$. And in order to reduce the surface tension in developing and drying processes, after a baking at 95 $$^{circ}$$C for 1 minute, developing and drying was performed with super-critical CO$$_{2}$$ at 12 MPa, 40 $$^{circ}$$C. As the result, the bridge structure which strung the wires fabricated by 520 MeV $$^{40}$$Ar$$^{14+}$$ hitting can be observed at the aimed points.


Fabrication of Y-junction waveguides using proton beam writing

三浦 健太*; 佐藤 隆博; 石井 保行; 江夏 昌志; 上原 政人*; 桐生 弘武*; 高野 勝昌*; 大久保 猛; 山崎 明義; 加田 渉; et al.

JAEA-Review 2011-043, JAEA Takasaki Annual Report 2010, P. 126, 2012/01

We develop optical waveguides using Proton Beam Writing (PBW). In this study, Y-junction PMMA film waveguides at 1.55 $$mu$$m were fabricated using PBW. First, an SiO$$_2$$ film was deposited as an under-cladding on an Si substrate using radio-frequency sputtering. After a PMMA film was spin-coated on the SiO$$_2$$ film, the sample was baked at 120 $$^{circ}$$C. The thickness of PMMA film became 10 $$mu$$m by repeating these processes twice. Next, a Y-junction waveguides with the width of 8 $$mu$$m and branching angle of 2 $$^circ$$ were drawn in the PMMA film on the condition of the dose of 100 nC/mm$$^2$$ using PBW having a 1.7 MeV proton beam with the current of 10 pA and the size of about 1 $$mu$$m. Finally, a 10-$$mu$$m thick PMMA film was deposited again on the sample as an upper-cladding layer by spin-coating. The observation of an optical microscope showed that an objective Y-junction was successfully drawn using PBW. To observe near field patterns (NFPs), the laser light of wavelength at 1.55 $$mu$$n was injected through a single-mode fiber (SMF) from one side of the edge of the waveguide cleaved both sides of the sample. The two independent NFPs were observed form each branching waveguide using a vidicon camera at the opposite side of the waveguide. The observation result of the two NFPs with an optical power intensity ratio of 1:0.98 demonstrated that the light of 1.55 $$mu$$m was divided at almost equal ratio by this Y-junction.


Fabrication of polymer optical waveguides for the 1.5-$$mu$$m band using focused proton beam

三浦 健太*; 町田 裕貴*; 上原 政人*; 桐生 弘武*; 小澤 優介*; 佐々木 友之*; 花泉 修*; 佐藤 隆博; 石井 保行; 江夏 昌志; et al.

Key Engineering Materials, 497, p.147 - 150, 2012/00

 被引用回数:7 パーセンタイル:94.99(Engineering, Electrical & Electronic)

Proton beam writing (PBW) is an attractive technique for next-generation micro-fabrication. We study the fabrication of optical waveguides of polymer materials using PBW. In this study, the optical waveguides of photorefractive polysilane "GLASSIA" was fabricated. The samples for the waveguides were prepared as follows; (1) An under-cladding layer of SiO$$_2$$ having a thickness of $$sim$$15 $$mu$$m was deposited on a Si substrate using radio-frequency sputtering. (2) A polysilane layer having a thickness of $$sim$$10 $$mu$$m was spin-coated onto the SiO$$_2$$ layer as a core layer. Optical waveguides were drawn by scanning a 1.7 MeV focused proton beam with $$sim$$1 $$mu$$m size and beam current of 50 pA which was produced by a submicron focused ion beam system connected with the 3 MV single-ended accelerator at JAEA. The drawing was carried out on the dose of 100, 200, 300 nC/mm$$^2$$ each. After the drawing, the sample surfaces were observed using an optical microscope and AFM. The observation result showed that the refractive index was changed and the cores of the waveguides were formed. We will report the details of above observation results in the conference. The change ratio of the refraction index will also be reported on the basis of the obtained result by inserting light ($$lambda$$ = 1.55 $$mu$$m) into the waveguide structure through a single-mode fiber.


Fabrication of polymer optical waveguides for the 1.5-$$mu$$m band using focused proton beam

三浦 健太*; 町田 裕貴*; 上原 政人*; 桐生 弘武*; 小澤 優介*; 佐々木 友之*; 花泉 修*; 佐藤 隆博; 石井 保行; 江夏 昌志; et al.

Key Engineering Materials, 497, p.147 - 150, 2011/12

 被引用回数:6 パーセンタイル:2.48

Single mode straight waveguides for a wavelength of 1.55-$$mu$$m were, so far, fabricated using a proton beam writing (PBW) technique. We report the fabrication of Y-junction polymer waveguides with a polymethyl methacralate (PMMA) layers as the expansion of these straight waveguides using PBW in the conference. The PMMA layers consisted of an under-cladding layer of SiO$$_2$$ having a thickness of $$sim$$ 15-$$mu$$m deposited on an Si substrate, a PMMA layer having a thickness of $$sim$$ 10-$$mu$$m spin-coated onto the SiO$$_2$$ layer and a Y-junction waveguide with a width of 8-$$mu$$m in a PMMA core layer. The Y-junction waveguides with the angle of 2$$^{circ}$$ were drawn using the 1.7 MeV proton beam with 1-$$mu$$m in diameter and a beam current of 10 pA for a dose of 100 nC/mm$$^2$$. After spin-coating the PMMA layer with $$sim$$ 10-$$mu$$m thickness as an upper cladding on the irradiated PMMA layer, the near field pattern (NFP) of an 8-$$mu$$m-width Y-junction waveguide was observed using a tunable-wavelength laser. The observation showed that the fabrication of waveguide was succeeded because its waveguide was single mode and the intensity ratio between the two outputted lights was the almost same; 1:0.96. We also briefly report the next plans of the measurement of the refractive indices of proton-irradiated PMMA and SiO$$_2$$ films and the fabrication of a thermo-optic polymer switch based on a Mach-Zehnder interferometer waveguide.


Microbeam complex at TIARA; Technologies to meet a wide range of applications

神谷 富裕; 高野 勝昌; 佐藤 隆博; 石井 保行; 西川 宏之*; 関 修平*; 杉本 雅樹; 奥村 進; 福田 光宏*

Nuclear Instruments and Methods in Physics Research B, 269(20), p.2184 - 2188, 2011/10

 被引用回数:15 パーセンタイル:73.66(Instruments & Instrumentation)

In order to meet wide variety of ion beam applications, three different types of ion microbeam systems were developed. These systems have shown the spatial resolutions of less than 1 $$mu$$m and have made it possible to irradiate minute targets or areas with positioning accuracies of less than 1 $$mu$$m. For micro-analyses, an in-air micro-PIXE system was originally developed on the light ion microbeam system. For micro-fabrication, technique of mask-less ion beam lithography was developed on the light-ion microbeam and other systems. Single-ion-hit technique was also realized to study single-event phenomena in semiconductors or biological cells induced by high-energetic heavy particles. On the other hand, the qualities of the beam from accelerators were important, such as stability of the intensity and the energy of the beams. In this paper, the latest progress and a future prospect of them were discussed.


Nano-micro processing of epoxy resin systems by ion beam lithography with multiple energies and species

高野 勝昌; 佐藤 隆博; 石井 保行; 江夏 昌志; 神谷 富裕; 大久保 猛; 杉本 雅樹; 西川 宏之*; 関 修平*

Transactions of the Materials Research Society of Japan, 36(3), p.305 - 308, 2011/09

Techniques of superimposed ion beam writing with different energies and species have been developed with targeting system at Takasaki Ion Accelerators for Advanced Radiation Application facility, TIARA, of JAEA/Takasaki. A bridge structure was fabricated by the superimposed writing of a girder pattern with 0.5 MeV proton beam adjusting to the bridge pier pattern written with 3 MeV proton beam, using SU-8 photoresist films coated on curing epoxy resin sheets. An upstanding column array with the diameter of sub-micron supported by the bridge structure was fabricated by the spot writing of 260 MeV Ne$$^{7+}$$ single ion hit adjusting to the girder pattern written with the 0.5 MeV proton beams.

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