Fabrication of poly(9,9'-dioctylfluorene)-based nano- and microstructures by proton beam writing

プロトン・ビーム・ライティングによるポリフルオレンフィルムのナノ・マイクロ構造体の製作

前吉 雄太*; 高野 勝昌*; 麻野 敦資*; 丸井 裕美*; 大道 正明*; 佐藤 隆博; 神谷 富裕; 石井 保行; 大久保 猛; 江夏 昌志; 加田 渉; 杉本 雅樹; 西川 宏之*; 佐伯 昭紀*; 関 修平*

Maeyoshi, Yuta*; Takano, Katsuyoshi*; Asano, Atsushi*; Marui, Hiromi*; Omichi, Masaaki*; Sato, Takahiro; Kamiya, Tomihiro; Ishii, Yasuyuki; Okubo, Takeru; Koka, Masashi; Kada, Wataru; Sugimoto, Masaki; Nishikawa, Hiroyuki*; Saeki, Akinori*; Seki, Shu*

A relation between the fluence and the beam-induced chemical reaction in poly(9,9'-dioctylfluorene), PFO, films has been investigated to fabricate PFO-based nano-micro structures using Proton Beam Writing, PBW. In this investigation, we observed that the cross-linking reaction in PFO occurred without a cross-linking agent using PBW. Furthermore, not only the surface morphology but also structure and shape on PFO films were changed from nano-meter to micro-meter size by controlling the fluence of proton beam irradiation on the basis of the investigation. Consequently, the structure of the arabic numbers was successful fabricated as three-dimensional PFO structures with the aspect ratio of 12 at the fluence of 3.5 10 ions/m by PBW.