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Fabrication of Mach-Zehnder polimer waveguides by a direct-drawing technique using a focus proton beam

集束プロトンビームを使った直接描画技術によるマッハツェンダーポリマー導波路の製作

三浦 健太*; 佐藤 隆博; 石井 保行; 桐生 弘武*; 小澤 優介*; 江夏 昌志; 高野 勝昌*; 大久保 猛; 山崎 明義; 加田 渉; 横山 彰人; 神谷 富裕; 花泉 修*

Miura, Kenta*; Sato, Takahiro; Ishii, Yasuyuki; Kiryu, Hiromu*; Ozawa, Yusuke*; Koka, Masashi; Takano, Katsuyoshi*; Okubo, Takeru; Yamazaki, Akiyoshi; Kada, Wataru; Yokoyama, Akihito; Kamiya, Tomihiro; Hanaizumi, Osamu*

We develop a thermo-optic switch of the Mach-Zehnder type polymer waveguide using proton beam writing (PBW). In this study, we succeeded in near field pattern Mach-Zehnder type single mode polymer waveguides at a wavelength of 1550 nm. The samples for the waveguides were composed with a 15-$$mu$$-thick under-cladding layer of SiO$$_2$$ deposited on a Si substrate using radio-frequency sputtering and a 10-$$mu$$m-thick PMMA film spin-coated onto the SiO$$_2$$ layer as a core layer. We wrote Mach-Zehnder type waveguides having a width of 8 $$mu$$m on the PMMA layer by PBW with a beam size of $$sim$$1 $$mu$$m and a beam current of 50 pA. After this writing, the 10-$$mu$$m-thick-PMMA layer was deposited again as an upper-cladding layer by spin-coating. In the observation of these waveguides, the light of laser of 1550-nm wavelength was injected into one side of the waveguide through a single-mode fiber. From the observation of the light emitted from the opposite side of the waveguides, near field patterns was observed using a vidicon camera with an optical microscope. The observation result demonstrated that the light traveled by single mode in the Mach-Zehnder type polymer waveguide. In the conference, we will report the development of the Mach-Zehnder type polymer waveguide in detail. In addition, the thermo-optic switch at the wavelength of 1550 nm by the Mach-Zehnder type polymer waveguide will also be briefly reported.

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