Dissociation kinetics of metastable oxygen molecule in Si(111) surface oxidation

Nishimoto, Kiwamu*; Tang, J.*; Ogawa, Shuichi*; Yoshigoe, Akitaka ; Ishizuka, Shinji*; Watanabe, Daiki*; Teraoka, Yuden; Takakuwa, Yuji*

no abstracts in English

Language	:	Japanese
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Meeting title	:	応用物理学会東北支部第67回学術講演会
Held date	:	2012/12
Location (city)	:	仙台
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	SPring-8(大型放射光施設)
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Article of JAEA R&D Review	:
Cooperating Institute	:	東北大学

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Registration No. : BB20122401
JAEA Abstracts No. :
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