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Development of a heat-resistant magnetic sensor

耐熱磁気センサの開発

高屋 茂 ; 荒川 尚*; 欅田 理*

Takaya, Shigeru; Arakawa, Hisashi*; Keyakida, Satoshi*

耐熱性フラックスゲートセンサを開発した。高キュリー温度材料であるパーメンジュールをコア材料として採用するとともに、磁場評価手法を改良した。300$$^{circ}$$Cでの特性を評価したところ、$$pm$$5Gの範囲で線形性を有し、感度は約0.89Gであった。

A heat-resistant flux gate magnetic sensor has been developed. Permendur, which has high Curie temperature, is employed as the magnetic core material and the detection method of the external magnetic field is modified. The characteristics of the developed magnetic sensor at 300$$^{circ}$$C were evaluated. The sensor output increases linearly with the external magnetic field in the range of $$pm$$5 G and the sensitivity is about 0.89 G.

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