Electrically detected magnetic spectroscopy on interface defects in 4H-SiC (000-1) C-face metal-oxide-semiconductor field effect transistors

Umeda, Takahide*; Sato, Yoshihiro*; Arai, Ryo*; Okamoto, Mitsuo*; Harada, Shinsuke*; Kosugi, Ryoji*; Okumura, Hajime*; Makino, Takahiro; Oshima, Takeshi

no abstracts in English

Language	:	Japanese
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Meeting title	:	2013年(平成25年)第60回応用物理学会春季学術講演会
Held date	:	2013/03
Location (city)	:	厚木
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	コバルト60照射施設
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Cooperating Institute	:	産業技術総合研究所; 筑波大学

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Registration No. : BB20123040
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