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Effects of radiation-induced defects on the charge collection efficiency of a silicon carbide particle detector

Iwamoto, Naoya; Onoda, Shinobu; Makino, Takahiro; Oshima, Takeshi; Kojima, Kazutoshi*; Nozaki, Shinji*

Effects of radiation induced defects on the charge collection efficiency (CCE) of 6H silicon carbide p$$^+$$n diode particle detectors have been studied. The detectors were irradiated with electrons at the energies of 0.1, 0.2, 0.5 and 1 MeV. The CCE of the detectors were measured with 5.5 MeV alpha particles. The CCE of the detector decreases by electron irradiation at energies of 0.2 MeV and higher. Defect named X$$_2$$ with an activation energy of 0.5 eV is found in all detectors which showed the decreased CCE. By thermal annealing at low temperatures such as at 200 $$^{circ}$$C, the decreased CCE is recovered and defect X$$_2$$ is removed. Therefore it is concluded that defect X$$_2$$ is responsible for the decreased CCE of 6H-SiC p$$^+$$n diode particle detectors.

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