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Defect-induced performance degradation of 4H-SiC Schottky barrier diode particle detectors

Iwamoto, Naoya; Johnson, B. C.; Hoshino, Norihiro*; Ito, Masahiko*; Tsuchida, Hidekazu*; Kojima, Kazutoshi*; Oshima, Takeshi

A correlation between radiation induced defects and charge collection performance of 4H-SiC Schottky barrier diodes has been studied. Charge collection efficiency (CCE) of the detectors is degraded by irradiation with 1 MeV electrons to a fluence of 1$$times10^{15}$$ cm$$^{-2}$$. Three electron traps, labeled EH$$_1$$, Z$$_{1/2}$$ and EH$$_3$$, are observed after the electron irradiation by deep level transient spectroscopy. Low temperature annealing at 300 $$^circ$$C is found to recover CCE significantly and remove EH$$_1$$ and EH$$_3$$ completely. On the other hand, Z$$_{1/2}$$ is not removed by annealing up to 400 $$^{circ}$$C, and does not correlate the annealing behavior of CCE. Therefore, we conclude that EH$$_1$$ and EH$$_3$$ are more responsible for the degraded CCE than Z$$_{1/2}$$.



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Category:Physics, Applied



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