Nano-meter scale modifications on material surfaces induced by soft X-ray laser pulse irradiations
石野 雅彦; Faenov, A.*; 田中 桃子; 保 智己*; Pikuz, T.; 長谷川 登; 錦野 将元; Inogamov, N.*; Skobelev, I.*; Fortov, V.*; Norman, G.*; Starikov, S.*; Stegailov, V.*; 海堀 岳史*; 河内 哲哉; 山極 満
Ishino, Masahiko; Faenov, A.*; Tanaka, Momoko; Tamotsu, Satoshi*; Pikuz, T.; Hasegawa, Noboru; Nishikino, Masaharu; Inogamov, N.*; Skobelev, I.*; Fortov, V.*; Norman, G.*; Starikov, S.*; Stegailov, V.*; Kaihori, Takeshi*; Kawachi, Tetsuya; Yamagiwa, Mitsuru
To study the interactions between soft X-ray laser (SXRL) beam and material surfaces, we irradiated the SXRL beam pulses having a wavelength of 13.9 nm and duration of 7 ps to Al, Au, Cu, and Si. Irradiated surfaces were observed using SEM and AFM. With single pulse irradiation, the formation of conical structures was observed on Al, and ripple-like structures were formed on Au and Cu. The conical structures on Al surface were destroyed under the multiple SXRL pulse exposures, but it was confirmed that the development of modified structures was observed after multiple pulse exposures on the Au and Cu surfaces. On the Si surface, deep holes that seemed to be melted structures induced by the accumulation of multiple pulses of irradiations were found. It was concluded that SXRL beam irradiation of various material surfaces causes different types of surface modifications, and the changes in the surface behaviors are attributed to the differences in the elemental properties, such as the melting points and the attenuation length of X-ray photons.