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Report No.

Development of high resistant anti-reflection coating by using Al$$_{2}$$O$$_{3}$$/SiO$$_{2}$$ multilayer

Ochi, Yoshihiro; Nagashima, Keisuke; Okada, Hajime; Tanaka, Momoko; Tateno, Ryo*; Furukawa, Yasuyuki*; Sugiyama, Akira

We designed and fabricated high damage-resistant AR coating using Al$$_{2}$$O$$_{3}$$/SiO$$_{2}$$ layers. As a result of irradiation test using 500 ps pulses at 1 kHz, the damage threshold of the AR coating was estimated to be over 36 J/cm$$^{2}$$ (average value). We also fabricated high reflection (HR) mirrors using Al$$_{2}$$O$$_{3}$$/SiO$$_{2}$$ layers added on Ta$$_{2}$$O$$_{5}$$/SiO$$_{2}$$ layers and measured damage threshold of them for 7 ns, 500 ps, and 1 ps pulses.



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