Time-resolved observation of oxides on Ge(100)-21 surface at room temperature using synchrotron radiation XPS

Yoshigoe, Akitaka ; Okada, Ryuta; Teraoka, Yuden; Iwai, Yutaro*; Yamada, Yoichi*; Sasaki, Masahiro*

Ge is much attracting as a new material in future electronic devices and therfore oxidation of Ge crystal surfaces is now important. In this conference, we report that evolution of oxides on Ge(100)-21 surface up to saturated oxidation for thermal-O and supersonic O (2.2 eV) beams was studied by time-resolved observation using synchrotron radiation XPS. We found that Ge/Ge is almost constant from early stages of oxidation to saturation.