Development of a new defect level characterization technique using heavy ion microbeams for wide bandgap semiconductors

Iwamoto, Naoya; Onoda, Shinobu; Fujita, Natsuko ; Makino, Takahiro; Oshima, Takeshi

no abstracts in English

Language	:	Japanese
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Meeting title	:	第8回高崎量子応用研究シンポジウム
Held date	:	2013/10
Location (city)	:	高崎
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	TIARA(イオン照射研究施設)
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Registration No. : BB20131972
JAEA Abstracts No. :
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