Development of a soft X-ray flat-field spectrograph in the 50-4000 eV range and its application to electron microscopes

Imazono, Takashi

We have developed a soft X-ray flat-field spectrograph capable to detect soft X-ray emissions in 50-4000 eV with high spectral resolution. The spectrograph in combination with an electron microscope such as transmission electron microscope (TEM) and electron probe micro-analyzer (EPMA) makes it possible to simultaneously perform not only the structural and elemental analyses of such functional materials as lithium-ion batteries and solar cells, but also chemical-bonding states analysis in the nano-scale area. In this article, the development of the soft X-ray flat-field spectrograph and preliminary experimental results measured by the spectrograph installed in EPMA and TEM are described.

Language	:	Japanese
Journal	:	Oyo Butsuri
Volume	:	83
Number	:	4
Pages	:	p.288 - 292
Publication Year/Month	:	2014/04
Meeting title	:
Held date	:
Location (city)	:
Location (country)	:
Patent information	:
PDF	:
Paper URL	:	http://www.jsap.or.jp/ap/2014/04/ob830288.xml
DOI for research data	:
Keywords	:	no keyword
Research Facility	:
Press Release	:
Article of JAEA R&D Review	:	Challenge for Nanoscale Analysis by X-ray Spectroscopy in Combination with Electron Microscopy; Development of a Multilayer Grating Spectrometer for Use with Electron Microscopes[/]
Cooperating Institute	:	日本電子; 島津製作所; 東北大学

Accesses	:	- Accesses
Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:
Altmetrics	:

Registration No. : AA20130727
JAEA Abstracts No. : 42000818
Paper Submission No. : 14452

[CLARIVATE ANALYTICS], [WEB OF SCIENCE], [HIGHLY CITED PAPER & CUP LOGO] and [HOT PAPER & FIRE LOGO] are trademarks of Clarivate Analytics, and/or its affiliated company or companies, and used herein by permission and/or license.