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Report No.

Fabrication of microstructures embedded in SC-CVD diamond with a focused proton microbeam

Kada, Wataru*; Kambayashi, Yuya*; Miura, Kenta*; Saruya, Ryota*; Kubota, Atsushi*; Sato, Takahiro; Koka, Masashi; Kamiya, Tomihiro; Hanaizumi, Osamu*

Micro-processing procedures have been extensively studied using a Proton Beam Writing (PBW) technique in order to fabricate two or three dimensional microscopic patterns in single-crystal chemical vapor deposition (SC-CVD) diamonds. In this study, various microscopic patterns were drawn on SC-CVD diamonds (3.0 mm $$times$$ 3.0 mm $$times$$ 0.5 mm IIa single-crystal) at various fluences with PBW using 0.75 and 3 MeV proton beams. The beam conditions of PBW other than the beam energy were as follows; a beam size of 1 $$mu$$m, a scanning area of 800 $$mu$$m $$times$$ 800 $$mu$$m and beam current of up to 100 pA. From the result of the observations based on the optical and electrical modification of SC-CVD, the microscopic patterns were fabricated in the diamonds by the micro-processing procedure varying fluence and beam energy. This result demonstrated that the micro-processing procedure with PBW enables us to fabricate the two or three dimensional microscopic patterns, which are optically and electrically modified, in SC-CVD diamonds by optimizing fluence and beam energy.



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