Development of fabrication technique for embedded-microstructures in single crystal CVD diamond by proton beam writing

Kambayashi, Yuya*; Kada, Wataru*; Saruya, Ryota*; Kubota, Atsushi*; Sato, Takahiro; Koka, Masashi; Ishii, Yasuyuki; Kamiya, Tomihiro; Miura, Kenta*; Hanaizumi, Osamu*

no abstracts in English

Language	:	Japanese
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Meeting title	:	2014年(平成26年)第61回応用物理学会春季学術講演会
Held date	:	2014/03
Location (city)	:	相模原
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	TIARA(イオン照射研究施設)
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Cooperating Institute	:	群馬大学

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Registration No. : BB20133445
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