Development and performance of a flat-field spectrograph for soft X-ray emission spectroscopy to be installed in electron microscopes

Imazono, Takashi; Koike, Masato; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; Oue, Yuki*; Yonezawa, Zeno*; Kuramoto, Satoshi*; Terauchi, Masami*; Takahashi, Hideyuki*; Handa, Nobuo*; Murano, Takanori*

We developed a flat-field spectrograph for soft X-ray emission spectroscopy in 50-4000 eV to be able to be installed in electron microscopes. The diffraction efficiency and resolving power of the spectrograph were evaluated by using synchrotron radiation and laser produced plasma soft X-ray light sources, respectively. The spectral performance of the spectrograph installed in a transmission electron microscope was evaluated. The K emission spectrum from metallic lithium and the L emission lines of indium and tin from tin-doped indium oxide (ITO) were clearly observed around 54 eV and 3.6 keV, respectively.