Fabrication of highly oriented Er $_{2}$ O $_{3}$ thin films by ion beam sputter deposition method

Fujita, Masaya*; Yamaguchi, Kenji; Asaoka, Hidehito ; Mao, W.*; Chikada, Takumi*; Suzuki, Akihiro*; Terai, Takayuki*

no abstracts in English

Language	:	Japanese
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Meeting title	:	2014年秋季第75回応用物理学会学術講演会
Held date	:	2014/09
Location (city)	:	札幌
Location (country)	:	日本
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Keywords	:	sputter etching; ion irradiation; thin film
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Registration No. : BB20141512
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Fabrication of highly oriented ErO thin films by ion beam sputter deposition method

Fabrication of highly oriented Er $_{2}$ O $_{3}$ thin films by ion beam sputter deposition method