In-situ stress observation of Si(111)77 reconstruction during Ge/Si heteroepitaxial growth

Uozumi, Yuki; Yamazaki, Tatsuya*; Asaoka, Hidehito

no abstracts in English

Language	:	Japanese
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Meeting title	:	2014年秋季第75回応用物理学会学術講演会
Held date	:	2014/09
Location (city)	:	札幌
Location (country)	:	日本
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Keywords	:	シリコン; 再構成表面; ストレス測定
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Registration No. : BB20141290
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