Sputtering of amorphous SiN irradiated with C $_{60}$ ions

Kitayama, Takumi*; Morita, Yosuke*; Nakajima, Kaoru*; Narumi, Kazumasa; Saito, Yuichi; Matsuda, Makoto ; Sataka, Masao*; Kimura, Kenji*

no abstracts in English

Language	:	Japanese
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Meeting title	:	日本物理学会2014年秋季大会(物性)
Held date	:	2014/09
Location (city)	:	春日井
Location (country)	:	日本
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Keywords	:	C60イオン; SiN; スパッタリング
Research Facility	:	TIARA(イオン照射研究施設)
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Article of JAEA R&D Review	:
Cooperating Institute	:	京都大学

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Registration No. : BB20141755
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Sputtering of amorphous SiN irradiated with C ions

Sputtering of amorphous SiN irradiated with C $_{60}$ ions