Design of high efficiency diffraction grating by use of diamond like carbon for the detection of Li-K emission

Koike, Masato; Imazono, Takashi; Ishino, Masahiko; Nagano, Tetsuya*; Sasai, Hiroyuki*; Oue, Yuki*; Kuramoto, Satoshi*; Terauchi, Masami*; Takahashi, Hideyuki*; Notoya, Satoshi*; Murano, Takanori*

The information about the chemical bond state when lithium ion went in and out of anode and cathode materials can be obtained by the measurements of Li-K emission of light around 22.8 nm (54.3 eV) released in the mild process of the valence band electron when a K-shell electron was activated. Conventinal amorphous carbon (C) film (density: 2.2 g/cm) or a high-density diamond like carbon (DLC) film (Tetrahedral amorphous carbon, density: 3.1 g/cm) was deposited on the diffraction gratings which the Au film which is a standard surface material to realize high sensitivity Li-K emission spectrum measurement. The DLC can be doposied by filtered arc method. In this paper we describe the design of the multilayered diffraction grating aiming at improvement of the diffraction efficiency.