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Effect of bombarding ion species during fabrication of Er$$_{2}$$O$$_{3}$$ film by means of ion beam sputter deposition

Fujita, Masaya*; Yamaguchi, Kenji; Asaoka, Hidehito  ; Mao, W.*; Chikada, Takumi*; Suzuki, Akihiro*; Terai, Takayuki*

no abstracts in English

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