Demonstration of the high collection efficiency of a broadband Mo/Si multilayer mirror with a graded multilayer coating on an ellipsoidal substrate

Ichimaru, Satoshi*; Takenaka, Hisataka*; Namikawa, Kazumichi*; Gullikson, E. M.*; Maruyama, Momoko; Oku, Satoshi*

A graded and broadband Mo/Si multilayer mirror for EUV spectroscopy is demonstrated. This mirror has an average reflectivity profile of 16% in the wavelength region from 15 nm to 17 nm and an effective area of 1100 - 1500 mm $^{2}$ . This reflectivity is about 4 times larger than that of a standard Mo/Si multilayer mirror on a 1 in. diameter substrate, showing that the mirror can be used for measuring EUV fluorescence at wavelengths in the region around 15 nm to 17 nm.

Language	:	English
Journal	:	Review of Scientific Instruments
Volume	:	86
Number	:	9
Pages	:	p.093106_1 - 093106_7
Publication Year/Month	:	2015/09
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Paper URL	:	https://doi.org/10.1063/1.4929708
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Keywords	:	no keyword
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Registration No. : AA20150462
JAEA Abstracts No. : 43001346
Paper Submission No. : 16434

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