Detection on molecularly oxygen adsorbate during room-temperature oxidation at Si(100) surface; Synchrotron radiation light shed light on issue over 3 decades

Yoshigoe, Akitaka ; Taga, Ryo*; Ogawa, Shuichi*; Takakuwa, Yuji*

In this conference, the experimental evidence on the existence of molecularly adsorbed oxygen during the oxidation of Si(100)21 surface, which was considered to be absent, is reported. Synchrotron radiation photoelectron spectroscopy measurements was used to reveal its presence during the oxidation at room temperature and -150 $^{circ}$ C.

Language	:	Japanese
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Meeting title	:	第16回東北大学多元物質科学研究所研究発表会
Held date	:	2016/12
Location (city)	:	仙台
Location (country)	:	日本
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Keywords	:	放射光光電子分光; リアルタイム観察; 表面吸着反応ダイナミクス
Research Facility	:	SPring-8(大型放射光施設)
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Registration No. : BB20161679
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