Automatic pressure control toward UHV surface process researches

Ajikawa, Yusuke*; Yamamoto, Yukio*; Yoshida, Hikaru; Yoshigoe, Akitaka 

A very small amount of gas control was indispensable for surface reaction experiments under ultrahigh vacuum conditions. Normally, it has been performed with a variable leak valve by the manual operation. However, the manual operation can not apply for advanced experiments such as multi-measurements. The automatic precise valve control would lead to the burden reduction and reproducible improvement. The antomatic control also has a metrit to avid the loss of control for the apparatus. In this conference, we will report recent developments of the automatic pressure control system and some results of precise pressure control from 10 to 10 Pa.