Uniform Si nano-dot fabrication using reconstructed structure of Si(110)

Yano, Masahiro ; Uozumi, Yuki*; Yasuda, Satoshi ; Asaoka, Hidehito

We have observed oxide decomposition process on Si(110). We have succeeded to observe metastable area and state by means of scanning tunneling microscope (STM) and X-ray photoemission spectroscopy (XPS), respectively.

Language	:	English
Journal	:	Japanese Journal of Applied Physics
Volume	:	57
Number	:	6S1
Pages	:	p.06HD04_1 - 06HD04_4
Publication Year/Month	:	2018/06
Meeting title	:	30th International Microprocesses and Nanotechnology Conference (MNC 2017)
Held date	:	2017/11
Location (city)	:	Jeju
Location (country)	:	Korea
Patent information	:
PDF	:
Paper URL	:	https://doi.org/10.7567/JJAP.57.06HD04
DOI for research data	:
Keywords	:	Si(110); Metastable States; Nanostructures
Research Facility	:
Press Release	:
Article of JAEA R&D Review	:
Cooperating Institute	:

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Registration No. : BB20171265
JAEA Abstracts No. : 48001049
Paper Submission No. : 23306

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