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Uniform Si nano-dot fabrication using reconstructed structure of Si(110)

Yano, Masahiro  ; Uozumi, Yuki*; Yasuda, Satoshi  ; Asaoka, Hidehito 

We have observed oxide decomposition process on Si(110). We have succeeded to observe metastable area and state by means of scanning tunneling microscope (STM) and X-ray photoemission spectroscopy (XPS), respectively.



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Category:Physics, Applied



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