Development of PALS evaluation technique using a miniature specimen

Ando, Hirokazu*; Yamawaki, Masato*; Hirade, Tetsuya  ; Akiyoshi, Masafumi*

Positron lifetime measurement (PALS) is a useful tool for evaluating nanometer-sized defects in materials such as metals and semiconductors. However, PALS measurement required two flat specimens placed at both sides of the positron source therefore it was difficult to apply PALS for one complicated shaped small specimen. Purpose of this research is developing a PALS method that can be applied for one small specimen having complicated shape. We succeeded to measure PALS spectra with just one specimen.