New progress in the observation and application of the laser-plasma in the semiconductors and dielectrics, 2; Study of non-thermal effects on femtosecond laser ablation of transparent dielectrics through the measurements of spallation dynamics

Kumada, Takayuki

We have developed time-resolved reflectivity measurement system using femtosecond laser pulses, which can measure structure of thin films generated by non-thermal effect.

Language	:	Japanese
Journal	:	Purazuma, Kaku Yugo Gakkai-Shi
Volume	:	96
Number	:	4
Pages	:	p.176 - 180
Publication Year/Month	:	2020/04
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PDF	:	AA2019-0379.pdf:0.66MB
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Keywords	:	フェムト秒レーザー加工; 反射率; 透明材料
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Registration No. : AA20190379
JAEA Abstracts No. : 48000720
Paper Submission No. : 23005

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