In-situ observation of oxidation on GaN surface by real-time XPS under irradiating oxidation gas

Sumiya, Masatomo*; Tsuda, Yasutaka ; Sakamoto, Tetsuya*; Sumita, Masato*; Sang, L.*; Harada, Yoshitomo*; Yoshigoe, Akitaka

no abstracts in English

Language	:	Japanese
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Meeting title	:	2021年第82回応用物理学会秋季学術講演会
Held date	:	2021/09
Location (city)	:	名古屋(online)
Location (country)	:	日本
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Keywords	:	半導体; 酸化; 窒化ガリウム
Research Facility	:	SPring-8(大型放射光施設)
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Article of JAEA R&D Review	:
Cooperating Institute	:	物質・材料研究機構; 理化学研究所

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Registration No. : BB20221032
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