Study of gas adsorption on the surface of NEG materials by HAXPES

Kobata, Masaaki ; Morohashi, Yuko ; Abe, Kazuhide; Yamada, Ippei ; Fukuda, Tatsuo ; Koarai, Kazuma ; Tanida, Hajime ; Kamiya, Junichiro

This study aimed to improve non-evaporable getter (NEG) coating technology on titanium substrates, focusing on lowering activation temperatures and enhancing repeatability. Using Hard X-ray Photoelectron Spectroscopy (HAXPES) and Secondary Ion Mass Spectrometry (SIMS), we analyzed NEG activation and degradation mechanisms. The effects of titanium, stainless steel (SUS316), and beryllium copper (BeCu) substrates on NEG properties were compared. Results suggested that the BeCu substrate had the lowest activation temperature, indicating its potential advantage for low-temperature NEG activation.

Language	:	Japanese
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Meeting title	:	第38回日本放射光学会年会・放射光科学合同シンポジウム
Held date	:	2025/01
Location (city)	:	つくば
Location (country)	:	日本
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Keywords	:	非蒸発ゲッターポンプ; HAXPES; 表面・界面; 化学状態; 活性化; その場観察
Research Facility	:	SPring-8(大型放射光施設);J-PARC加速器
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Registration No. : BB20241171
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