Photon-stimulated ion desorption from mono- and multilayered silicon alkoxide on silicon by core-level excitation

Baba, Yuji ; Wu, G.; Sekiguchi, Tetsuhiro ; Shimoyama, Iwao

no abstracts in English

Language	:	English
Journal	:	Journal of Vacuum Science and Technology A
Volume	:	19
Number	:	4
Pages	:	p.1485 - 1489
Publication Year/Month	:	2001/07
Meeting title	:	American Vacuum Society 47th International Symposium
Held date	:	2000/10
Location (city)	:	Boston
Location (country)	:	U. S. A.
Patent information	:
PDF	:
Paper URL	:	https://doi.org/10.1116/1.1359545
DOI for research data	:
Keywords	:	Photon-stimilated Ion Desorption; Silicon Alkoxide; Core-level Excitation
Research Facility	:
Press Release	:
Article of JAEA R&D Review	:
Cooperating Institute	:

Accesses	:	- Accesses
Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:	Percentile:26.32 Category:Materials Science, Coatings & Films
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Registration No. : B20000187
JAEA Abstracts No. : 300533
Paper Submission No. : 19064

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