Nanoscale diffusion tracing by radioactive Li tracer

石山 博恒*; Jeong, S.-C.*; 渡辺 裕*; 平山 賀一*; 今井 伸明*; 宮武 宇也*; 小柳津 充広*; 片山 一郎*; 長 明彦; 乙川 義憲; et al.

Japanese Journal of Applied Physics, 53(11), p.110303_1 - 110303_4, 2014/11

https://doi.org/10.7567/JJAP.53.110303

We have developed a nanoscale diffusion measurement method using an -emitting radioactive Li tracer. In this method, while implanting a pulsed 8 keV Li beam, the particles emitted at a small angle (10) relative to the sample surface were detected as a function of time. The method has been successfully applied to measuring lithium diffusion coefficients for an amorphous LiSiO-LiVO (LVSO) thin film with a thickness of several hundred nanometers, demonstrating that the present method is sensitive to diffusion coefficients down on the order of 10cm/s, which is more sensitive by about two orders of magnitude than that previously achieved.