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論文

Activation and control of visible single defects in 4H-, 6H-, and 3C-SiC by oxidation

Lohrmann, A.*; Castelletto, S.*; Klein, J. R.*; 大島 武; Bosi, M.*; Negri, M.*; Lau, D. W. M.*; Gibson, B. C.*; Prawer, S.*; McCallum, J. C.*; et al.

Applied Physics Letters, 108(2), p.021107_1 - 021107_4, 2016/01

 被引用回数:26 パーセンタイル:81.53(Physics, Applied)

Creation and characterisation of single photon emitters near the surface of 4H- and 6H-silicon carbide bulk substrates and 3C-SiC epitaxially grown on silicon substrates were investigated. These single photon emitters can be created and stabilized by thermal annealing in an oxygen atmosphere at temperatures above 550 $$^{circ}$$C. Hydrofluoric acid (HF) treatment is shown to effectively annihilate the emission from defects and to restore an optically clean surface. However, the emission from the defects can be obtained after re-oxidation above 550 $$^{circ}$$C. By measuring using standard confocal microscopy techniques, the excited state lifetimes for the emitters are found to be in the nanosecond regime in all three polytypes, and the emission dipoles are aligned with the lattice.

口頭

高温熱処理したSiC中に存在する単一光子源

大島 武; Lohrmann, A.*; Johnson, B. C.*; Castelletto, S.*; 小野田 忍; 牧野 高紘; 武山 昭憲; Klein, J. R.*; Bosi, M.*; Negri, M.*; et al.

no journal, , 

量子スピントロニクスや量子フォトニクスへの応用が期待される炭化ケイ素半導体(SiC)中の単一光子源(SPS)に関して、デバイス作製の際に用いる高温熱処理といったプロセス後にも安定に存在するSPSの探索を行った。共焦点蛍光顕微鏡(CFM)観察の結果、1600$$^{circ}$$C以上での熱処理後も550$$sim$$600nmの波長帯に室温においても高輝度で発光特性を示すSPSが存在することが確認された。加えて、未熱処理のSiC基板のCFM観察を行ったところ、非常に少量ではあるが同様なSPSが存在することも判明したが、発光は不安定であり、数秒間の観察中に発光が消失してしまうことが見いだされた。そこで、熱処理温度(酸素中、5分間)とSPSの発光の安定性の関係を調べたところ、550$$^{circ}$$C以上の熱処理で発光が安定化することが明らかとなった。

口頭

Visible range photoluminescence from single photon sources in 3C, 4H and 6H silicon carbide

Lohrmann, A.*; Castelletto, S.*; Klein, J. R.*; Bosi, M.*; Negri, M.*; Lau, D. W. M.*; Gibson, B. C.*; Prawer, S.*; McCallum, J. C.*; 大島 武; et al.

no journal, , 

The single photon sources (SPSs) in the visible spectral region were fabricated near the surface of semi-insulating (SI) 4H-silicon carbide (SiC), SI 6H-SiC substrates and 3C-SiC epitaxial films by annealing in dry oxygen. The photoluminescence (PL) with high intensity was observed from samples after oxygen annealing above 550 $$^{circ}$$C although blinking characteristics of PL were observed from samples annealed below 550 $$^{circ}$$C. Also, the samples annealed above 550 $$^{circ}$$C showed blinking characteristics after removing oxygen atoms terminating the surface by HF-etching. Therefore, we can conclude that the oxygen termination is important to obtain stable PL characteristics from the SPSs near the surface of SiC.

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