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論文

Soft-lithographic methods for the fabrication of dielectrophoretic devices using molds by proton beam writing

椎根 康晴*; 西川 宏之*; 古田 祐介*; 金光 薫*; 佐藤 隆博; 石井 保行; 神谷 富裕; 中尾 亮太*; 内田 諭*

Microelectronic Engineering, 87(5-8), p.835 - 838, 2010/05

 被引用回数:6 パーセンタイル:40.05(Engineering, Electrical & Electronic)

Proton Beam Writing (PBW) is a direct writing process using a MeV focused proton beam. The previous performance examinations of the dielectrophoretic (DEP) devices, the high-aspect-ratio micro-structures with the pillar arrays and the fluidic channels fabricated by PBW, showed that spatially modulated electric fields were effective for trapping Escherichia coli. The reproduction of the DEP device using PBW only is, however, unsuitable because it takes a lot of time to fabricate complicated and large area structures. In this study, the fabrication technique of the micro fluidic channel, combining a soft lithography and PBW techniques, was introduced to improve the productivity of the DEP devices. The prototypes of DEP deceives including SU-8 high-aspect-ratio pillar arrays in the micro fluidic channel were developed using the fabrication technique. Especially the pillar arrays in these devices were produced by 1.0 or 1.7 MeV proton beams focused around 1 $$mu$$m in diameter. The observation of the DEP devices using an optical microscope image showed that the pillar arrays were successfully included in the micro fluidic channel. The prototyping capability of PBW combined with the soft lithography technique was highlighted by increasing the productivity of the DEP devices.

口頭

Development of dielectrophoretic devices with high-aspect ratio microstructures using proton beam writing

椎根 康晴*; 西川 宏之*; 古田 祐介*; 佐藤 隆博; 石井 保行; 神谷 富裕; 中尾 亮太*; 内田 諭*

no journal, , 

New types of electric micro filter with the high-aspect-ratio structures having a capability of electrically trapping food poisoning bacteria such as Escherichia coli ($$it E.coli$$) were developed as an application of the Proton Beam Writing (PBW). A 14-$$mu$$m-thick negative-resist layer of SU-8 was spin-coated, as a specimen, on a silica substrate a part of which was, in advance, covered with a pair of Au thin layer electrodes on its surface. High-aspect-ratio pillar arrays were fabricated by PBW. In this study, the trapping capability of the high-aspect-ratio pillar arrays was evaluated using the suspension including $$it E.coil$$ stained with SYTO9. The photoluminescence (PL) from the stained $$it E.coil$$ trapped among the pillar arrays in the Au electrode gap was measured for the evaluation by applying an AC voltage to its Au electrodes, flowing the suspension. We also evaluated electric micro filters with and without the pillar arrays for the trapping capability. The amount of the stained $$it E.coli$$ trapped among the pillar arrays was higher than the conventional electric micro filter without pillar arrays. The improved performance of the new electric micro filter is reported on the basis of changing the height and spacing of the pillars.

口頭

集束プロトンビーム描画によるSU-8モールドを用いたPDMSマイクロ流路の作製

椎根 康晴*; 西川 宏之*; 森 敏輝*; 佐藤 隆博; 石井 保行; 神谷 富裕; 中尾 亮太*; 内田 諭*

no journal, , 

本研究の目的は、PBW(Proton Beam Writing)技術を用いて高アスペクト比構造を有する3次元誘電泳動(Dielectrophoresis, DEP)デバイスの作製を行うことである。今回、PBW技術とソフトリソグラフィー技術とを組合せることで、3次元DEPデバイスを簡便に作製法できることが示せたので、これに関して発表を行う。この簡便な製作法としてPBWにより作製したSU-8モールドを母型とし、これにPDMS (poly-dimethylsiloxane)転写液を流し込むことで、ピラー・マイクロ流路の一括転写を行った。発表の中ではPBW技術とソフトリソグラフィー技術を用いることで簡便に3次元誘電泳動デバイスの作製を行うことができることに関して言及するとともに、今後の課題としてDEPデバイスとして誘電泳動実験やPDMSピラーのアスペクト比の向上に関しても言及する。

口頭

Fabrication of three-dimensional pillar arrays by PBW for improved trapping performance of dielectrophoretic devices

椎根 康晴*; 坂下 裕介*; 西川 宏之*; 佐藤 隆博; 石井 保行; 神谷 富裕; 中尾 亮太*; 内田 諭*

no journal, , 

Proton beam writing (PBW) is a direct writing technique using MeV focused proton beams. A dielectric pillar array for a dielectrophoresis (DEP) trapping site of food poisoning microbes is fabricated as an application of PBW. The high-aspect-ratio pillar arrays with the height of several tens of micrometers have, so far, been fabricated by PBW to increase the effective density and volume of the DEP trapping sites, whose effectiveness was demonstrated by the trapping experiments of Escherichia coli (E. coli) of the microbes. In this study, dielectric pillar arrays with the multi-level 3D structures of SU-8 were fabricated to further improve their trapping efficiency. In this fabrication, the combination technique of PBW and the hydrogen ion beam writing (HBW) which was a PBW technique using 1.0 MeV H$$_2^+$$ beam was used to irradiate SU-8 in a short time by switching from the proton beam to hydrogen ion beams with the same energies but different penetration depths. The irradiation of PBW and HBW was preformed by the dedicated PB writer at Shibaura Institute of Technology. The fabrication of the dielectric pillar arrays with the multi-level 3D structures was successfully done using the combination technique. The results of the fabrication and their performance tests will be shown in the presentation in detail.

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