Ion beam modification of ZnO thin films on MgO

Matsunami, Noriaki*; Ito, Masaharu*; Takai, Yoshiaki*; Tazawa, Masato*; Sataka, Masao

no abstracts in English

Language	:	English
Journal	:	Nuclear Instruments and Methods in Physics Research B
Volume	:	206
Number	:
Pages	:	p.282 - 286
Publication Year/Month	:	2003/05
Meeting title	:	13th International Conference on Ion Beam Modification of Materials (IBMM 2002)
Held date	:	2002/09
Location (city)	:	Kobe
Location (country)	:	Japan
Patent information	:
PDF	:
Paper URL	:	https://doi.org/10.1016/S0168-583X(03)00745-6
DOI for research data	:	Link to research data related to this paper/report.
Keywords	:	イオンビーム改質; ZnO; Neイオン; 薄膜; 電子的特性; 光学特性; 結晶性
Research Facility	:
Press Release	:
Article of JAEA R&D Review	:
Cooperating Institute	:	名古屋大学

Accesses	:	- Accesses
Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:	Percentile:81.10 Category:Instruments & Instrumentation
Altmetrics	:

Registration No. : B20020584
JAEA Abstracts No. :
Paper Submission No. :

[CLARIVATE ANALYTICS], [WEB OF SCIENCE], [HIGHLY CITED PAPER & CUP LOGO] and [HOT PAPER & FIRE LOGO] are trademarks of Clarivate Analytics, and/or its affiliated company or companies, and used herein by permission and/or license.