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放射光軟X線顕微XAFS装置の立ち上げ

Outline of micro-XAFS system installed at the synchrotron soft X-ray beamline

馬場 祐治; 関口 哲弘; 下山 巖; 平尾 法恵*

Baba, Yuji; Sekiguchi, Tetsuhiro; Shimoyama, Iwao; Hirao, Norie*

高エネルギー加速器研究機構放射光科学研究施設(KEK-PF)の放射光ビームラインBL-27Aに設置された軟X線顕微X線吸収微細構造(顕微XAFS)測定装置の概要をまとめた。本装置は、固体表面のミクロンからナノメートルオーダーの局所領域における形状,凹凸,元素分布,化学結合状態分布のマッピングを行うことを目的として設置された。報告書では、装置の概要,仕様,操作法について述べた後、紫外光源を用いたSiマイクロパターンの観察と分解能測定及び放射光軟X線を用いたSi-SiO$$_{2}$$マイクロパターンの測定結果を記す。

The present report summarizes the outline and details of synchrotron soft X-ray micro-XAFS (X-ray absorption fine structure) system installed at the synchrotron beamline (BL-27A) of the Photon Factory (PF), High Energy Accelerator Research organization (KEK). The system was installed for the purpose of measuring morphology, element-selective and chemical-state-selective mappings of solid surfaces at micrometer or nanometer scale. In this report, the detailed outlines, specification, and operation manual are firstly described. Then the experimental data about the observations on Si micro-pattern and estimation of spacial resolution using ultraviolet light are presented.Preliminary experimental results for chemical-state-selective mapping of Si/SiO$$_{2}$$ micro-patterns using synchrotron radiation are also presented.

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