JAEA has developed the MeV accelerator to demonstrate 1 MeV, 200 A/m H ion beam acceleration required for ITER NBI. A key to realize such a high power accelerator is improvement of voltage holding capability. Based on detailed investigation of the voltage holding characteristics, MeV accelerator was modified to reduce electric field concentration by extending gaps between the grid supports and increasing curvature radiuses at the support corners. After the modifications, accelerator succeeded in sustaining -1 MV in vacuum without beam acceleration. Moreover, beam deflection due to the magnetic field for electron suppression and space charge repulsion was compensated by aperture displacement technique. As the result, beam deflection was compensated and voltage holding during the beam acceleration was improved. Beam parameter of the MeV accelerator was increased to 980 keV, 185 A/m, which is close to the requirement of ITER accelerator.
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