Ion scattering spectroscopy of polarity-controlled ZnO surfaces by 1-2 MeV C ions

1-2MeV Cイオンによる極性制御されたZnO表面のイオン散乱分光解析

本橋 健次*; 齋藤 勇一; 宮脇 信正; 神谷 富裕

Motohashi, Kenji*; Saito, Yuichi; Miyawaki, Nobumasa; Kamiya, Tomihiro

We studied the mechanism of collisions between 1-2-MeV carbon ions and polarity-controlled ZnO surfaces in order to investigate the efficient reflection of swift ions on solid surfaces for transportation of ion beams without magnetic and/or electrostatic beam handling. The intensities of ions scattered on three different surfaces of Zn and O faces of the ZnO crystals and a polycrystalline Au film were measured by a Si surface barrier detector. As a result, the intensity on the Zn face of the ZnO crystals significantly increased at 2-MeV comparing to that at 1-MeV, although there was a small increase in intensity in the case of the O face of the ZnO and Au surfaces. The details of this finding have not been clarified yet. However, efficient reflection of MeV ions is expected on polarity-controlled ZnO surfaces.