Change in electrical properties SiC-MOS capacitor and PiN diode after ray irradiation

Tanaka, Kazuya*; Yokoseki, Takashi*; Fujita, Natsuko ; Iwamoto, Naoya; Makino, Takahiro; Onoda, Shinobu; Oshima, Takeshi; Tanaka, Yuki*; Kandori, Mikio*; Yoshie, Toru*; Hijikata, Yasuto*

no abstracts in English

Language	:	Japanese
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Meeting title	:	SiC及び関連半導体研究第22回SiC講演会
Held date	:	2013/12
Location (city)	:	さいたま
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	コバルト60照射施設
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Registration No. : BB20132440
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