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※ 半角英数字
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耐熱磁気センサの開発

Development of heat-resistant magnetic sensor

高屋 茂 ; 荒川 尚*; 欅田 理*

Takaya, Shigeru; Arakawa, Hisashi*; Keyakida, Satoshi*

耐熱性のフラックスゲート型磁気センサを開発した。高キュリー温度を有するパーメンジュールを磁性コア材料として採用し、同材料の磁気特性を考慮して外部磁場の検出原理の改良を行った。500$$^{circ}$$Cまでのセンサの出力特性を調べ、直線性を有することを示した。測定温度の上昇とともに感度の低下が認められたことから、磁気コア材の酸化の影響について検討し、酸化が感度低下の主要因でないことを確認した。

A hear-resistant magnetic sensor was newly developed. Permendur, a high Curie temperature material, was employed as a magnetic core material, and magnetic detection principle was modified by taking the magnetic property of Permendur into account. It was shown that sensor output is linear with respect to external magnetic field at least up to 500$$^{circ}$$C, though sensitivity decreased slightly with temperature. Effect of oxidation of magnetic core was investigated, but it was concluded that oxidation of magnetic core is not major factor of decreasing in sensitivity.

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