Roles of excess minority carrier recombination and chemisorbed O species at SiO/Si interfaces in Si dry oxidation

Tsuda, Yasutaka ; Yoshigoe, Akitaka ; Ogawa, Shuichi*; Sakamoto, Tetsuya*; Yamamoto, Yoshiki*; Yamamoto, Yukio*; Takakuwa, Yuji*

no abstracts in English

Language	:	Japanese
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Meeting title	:	2024年第71回応用物理学会春季学術講演会
Held date	:	2024/03
Location (city)	:	東京
Location (country)	:	日本
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Keywords	:	シリコン; 酸化; 放射光; 光電子分光
Research Facility	:	SPring-8(大型放射光施設)
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Article of JAEA R&D Review	:
Cooperating Institute	:	福井工業高等専門学校; 東北大学; 日本大学

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Registration No. : BB20231875
JAEA Abstracts No. :
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