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Report No.

Minute SiC products synthesized from polyvinylsilane with radiation curing

Idesaki, Akira; Sugimoto, Masaki; Tanaka, Shigeru; Narisawa, Masaki*; Okamura, Kiyohito*; Ito, Masayoshi*

Minute SiC products were synthesized from polyvinylsilane (PVS), which is a liquid organosilicon polymer, with radiation curing. The PVS was injected into molds whose patterns were square and circle with 50$$mu$$m in side or diameter, and 10$$mu$$m in depth. The molds containing the PVS were irradiated by $$gamma$$-ray with dose of 3.6MGy at room temperature in vacuum, and heat-treated at 1273K in Ar gas atmosphere. The obtained SiC products had shapes similar to those of the molds, and the sizes of the products were about 30$$mu$$m in side or diameter.



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