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Depth-profiling using angular-resolved X-ray photoelectron spectroscopy and the maximum entropy method

角度依存放射光X線光電子分光及びエントロピー最大化法を用いた深さ方向分布評価

Harries, J.; 戸出 真由美; 角本 雄一; 井上 敬介; 吉越 章隆 ; 寺岡 有殿

Harries, J.; Tode, Mayumi; Sumimoto, Yuichi; Inoue, Keisuke; Yoshigoe, Akitaka; Teraoka, Yuden

光電子分光はおもに表面敏感な手法である。しかし光電子分光スペクトルの角度依存性から深さ方向の元素分布について情報を得ることも可能である。ラザフォード散乱等の他手法に比べて化学結合状態について評価できるというメリットがあるに対し、高度なデーター解析が必要である。ここではSPring-8、BL23SUで測定した窒化Al(111)及びVCrTiの自然酸化膜及び重水素化した資料の表面近辺の元素分布を評価する。

Photoelectron spectroscopy is predominantly a surface-sensitive technique, but by recording spectra at a range of angles information on the depth-dependent distribution of elements in specific chemical states can also be obtained. Compared to other techniques such as Rutherford back-scattering, the technique has the advantage of chemical-state specificity, but the drawback that it requires very careful data analysis to produce reliable and quantitative results. Here we report progress in obtaining chemical-state depth profiles from photoelectron spectra recorded using the SUREAC2000 apparatus at SPring-8's BL23SU. Results will be presented for ARXPS data recorded for N and O layers on Al(111), and also a VCrTi sample, both in its as-received state and following deuterium ion dosing.

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