SR-XPS study on the native oxide of VCrTi and its modification by deuterium ion implantation

SR-XPSによるVCrTiの自然酸化膜と重水素注入による変化に関する研究

戸出 真由美; Harries, J.; 寺岡 有殿; 角本 雄一; 井上 敬介; 吉越 章隆 

Tode, Mayumi; Harries, J.; Teraoka, Yuden; Sumimoto, Yuichi; Inoue, Keisuke; Yoshigoe, Akitaka

In order to study the correlation between the hydrogen desorption temperature and the chemical bonding states of the oxide layer, photoemission spectroscopy with soft X-ray synchrotron radiation has been applied for analyses of the native oxide on the polycrystalline VCrTi alloy surface and its thermal instability. Before thermal annealing, V-2p peaks from the bulk could be observed with a photon energy of 1247 eV, in addition to broad oxides peaks. The O-1s peak consisted of at least two components and decreased with thermal annealing. The lower binding energy component is decreased remarkably than that of the higher energy component. For the deuterium ion implanted surface, however, the O-1s peak kept its profile until 573 K. After desorption of D molecules at around 570 K, the native oxide layer started changing its structure. Consequently deuterium implantation affected the thermal stability of the native oxide.