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Capacitance transient study of a bistable deep level in e$$^{-}$$-Irradiated n-type 4H-SiC

電子線照射したn型4H-SiC中の準安定ディープレベルの過渡キャパシタンス測定

Beyer, F. C.*; Hemmingsson, C. G.*; Pedersen, H.*; Henry, A.*; 磯谷 順一*; 森下 憲雄*; 大島 武; Janz$'e$n, E.*

Beyer, F. C.*; Hemmingsson, C. G.*; Pedersen, H.*; Henry, A.*; Isoya, Junichi*; Morishita, Norio*; Oshima, Takeshi; Janz$'e$n, E.*

A bistable center, named FB center, in electron irradiated 4H-SiC was observed using capacitance transient techniques. In configuration called "$$A$$", the deep level known as EH5 ($$E$$$$_{a}$$ = $$E$$$$_{C}$$ - 1.07 eV) is detected in the deep level transient spectroscopy spectrum, whereas for configuration called "$$B$$", no obvious deep level is observed in the accessible part of the band gap. Isochronal annealing revealed that the transition temperatures to be from $$A$$ to $$B$$ is more than 730K, and for the opposite process from $$B$$ to $$A$$ is about 710 K. The energy needed to conduct the transformations were determined to be $$E$$$$_{A}$$($$A$$ to $$B$$) = (2.1 $$pm$$ 0.1) eV and $$E$$$$_{A}$$($$B$$ to $$A$$) = (2.3 $$pm$$ 0.1) eV, respectively. Since the bistable FB centre is already present after low-energy electron irradiation (200 keV), it is likely related to carbon.

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パーセンタイル:60.08

分野:Physics, Applied

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