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Synchrotron radiation photoelectron spectroscopy and near-edge X-ray absorption fine structure study on oxidative etching of diamond-like carbon films by hyperthermal atomic oxygen

超熱原子状酸素によるダイヤモンドライクカーボン膜の酸化エッチングに関する放射光光電子分光とX線吸収端近傍微細構造測定

田川 雅人*; 横田 久美子*; 北村 晃*; 松本 康司*; 吉越 章隆 ; 寺岡 有殿; 神田 一浩*; 新部 正人*

Tagawa, Masahito*; Yokota, Kumiko*; Kitamura, Akira*; Matsumoto, Koji*; Yoshigoe, Akitaka; Teraoka, Yuden; Kanda, Kazuhiro*; Niibe, Masahito*

超熱原子状酸素ビームに曝した水素化ダイヤモンドライクカーボン(DLC)膜の表面構造変化を、ラザフォード後方散乱分光(RBS),放射光光電子分光(SR-PES),X線吸収端微細構造解析(NEXAFS)で調べた。DLC表面は酸化され、原子状酸素の高エネルギー衝突でエッチングされることがわかった。RBSとリアルタイム質量損失測定では原子状酸素強度とエッチング量は比例した。SR-PESでは酸化層はDLC膜の最表面に限られることがわかった。NEXAFSからはDLCのsp$$^{2}$$構造が選択的にエッチングされ、sp$$^{3}$$リッチ領域がDLC表面に残ることがわかった。DLC表面にsp$$^{3}$$リッチ領域が生成すると表面荒れが起こり、初期のDLC表面に比べてエロージョン収率が減少することがわかった。

Surface structural changes of a hydrogenated diamond-like carbon (DLC) film exposed to a hyperthermal atomic oxygen beam were investigated by Rutherford backscattering spectroscopy (RBS), synchrotron radiation photoelectron spectroscopy (SR-PES), and near-edge X-ray absorption fine structure (NEXAFS). It was confirmed that the DLC surface was oxidized and etched by high-energy collisions of atomic oxygen. RBS and real-time mass-loss data showed a linear relationship between etching and atomic oxygen fluence. SR-PES data suggested that the oxide layer was restricted to the topmost surface of the DLC film. NEXAFS data were interpreted to mean that the sp$$^{2}$$ structure at the DLC surface was selectively etched by collisions with hyperthermal atomic oxygen, and an sp$$^{3}$$-rich region remained at the topmost DLC surface. The formation of an sp$$^{3}$$-rich layer at the DLC surface led to surface roughening and a reduced erosion yield relative to the pristine DLC surface.

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パーセンタイル:50.91

分野:Chemistry, Physical

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