Hydrogen removal from hydrogenated diamond-like carbon films by exposure to photon and energetic atomic oxygen beams

光子及びエネルギーを持った原子状酸素ビーム照射によるダイヤモンドライクカーボン薄膜からの水素除去

横田 久美子*; 田川 雅人*; 松本 康司*; 古山 雄一*; 北村 晃*; 神田 一浩*; 戸出 真由美; 吉越 章隆 ; 寺岡 有殿

Yokota, Kumiko*; Tagawa, Masahito*; Matsumoto, Koji*; Furuyama, Yuichi*; Kitamura, Akira*; Kanda, Kazuhiro*; Tode, Mayumi; Yoshigoe, Akitaka; Teraoka, Yuden

Stability of hydrogen in Diamond-like carbon (DLC) film under simulated space environment, i.e., hyperthermal atomic oxygen, vacuum ultraviolet (VUV) and soft X-ray exposures has been studied. Hydrogen in DLC was released by low-energy atomic oxygen beam exposure, whereas the gasification reaction of carbon atom needed collision energy above 3 eV. The desorption process in the deep region required a higher collision energy. The density of hydrogen decreased 11% by atomic oxygen exposure, and was independent of the collision energy. Photon exposure also releases hydrogen from DLC. High-energy photons in soft X-ray promote the hydrogen desorption even from deeper region with high efficiency. It was considered that soft X-ray could release bonded hydrogen which is not released by VUV or atomic oxygen exposures.