Electrical conduction properties of SiC modified by femtosecond laser

フェムト秒レーザーにより改質されたSiCの電気伝導特性

伊藤 拓人*; 出来 真斗; 富田 卓朗*; 松尾 繁樹*; 橋本 修一*; 北田 貴弘*; 井須 俊郎*; 小野田 忍; 大島 武

Ito, Takuto*; Deki, Manato; Tomita, Takuro*; Matsuo, Shigeki*; Hashimoto, Shuichi*; Kitada, Takahiro*; Isu, Toshiro*; Onoda, Shinobu; Oshima, Takeshi

The polarization dependence of local electric conductivity in Silicon carbide (SiC) modified by femtosecond laser (fs-laser) was studied. The surface of SiC was irradiated by fs-laser with the different polarization configurations. In the case that the scanning direction is parallel to the electric field, the local electric conductivity drastically increases with increasing fs-laser fluence. On the other hand, in the case that the scanning direction is perpendicular to electric field, the local electric conductivity slightly increase with increasing fluence. According to Raman spectroscopy and secondary electron microscope observation, we found that the amorphous-Si, -C, -SiC are created for parallel irradiation, but the amorphous-SiC is created for perpendicular irradiation. Therefore, we suggests that the polarization dependence of local electric conductivity is due to the chemical composition of laser modified region.